K-Patents Process Refractometers for Semiconductor Industry

K-Patents provides Process Refractometers for real-time concentration monitoring in wet chemical process applications in the semiconductor and microelectronics fabrication. K-Patents Semicon Process Refractometer is an all purpose transmitter, in the sense that the same instrument can be used to monitor all kinds of liquid chemicals.

K-Patents Semicon Refractometer is designed to be used in bulk chemical distribution, mixing, blending and dilution, and in point-of-use in the fab. The key control function is to monitor and to provide an alarm, if the chemical is out of specifications. This prevents wrong chemicals or wrong concentrations from being dispensed on to the process and thus helps avoiding very costly production problems.

PR-33-S K-Patents Semicon Process Refractometer PR-33-S
A small footprint, PVDF covered sensor for cleanroom environment and integrated process tools. Monitors the chemical concentrations in real-time and provides an Ethernet output signal and immediate feedback to the control system. Connected through a modified PTFE flow cell body to the process by a 1/4 inch, 1/2 inch, 3/4 inch or 1 inch pillar or flare fitting.
PR-23-MS K-Patents Semicon Process Refractometer PR-23-MS
A compact refractometer with an ultra pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a 1/4 inch, 1/2 inch, 3/4 inch or 1 inch pillar or flare fitting.


To find out how You can benefit from using a K-Patents digital process refractometer, please contact us or send us a Quotation request.