K-Patents Oy - semiconductor

K-Patents Process Refractometers for Semiconductor Industry K-Patents provides Process Refractometers for real-time concentration monitoring in wet chemical process applications in the semiconductor and microelectronics fabrication. K-Patents Semicon Process Refractometer is an allpurpose transmitter, in the sense that the same instrument can be used to monitor all kinds of liquid chemicals. K-Patents Semicon Refractometer is designed for use in bulk chemical distribution, mixing, blending and dilution, and in point-of-use in the fab. The key control function is to monitor and to provide an alarm, if the chemical is out of specifications. This prevents wrong chemicals or wrong concentrations from being dispensed onto the process and thus helps avoiding very costly production problems.
	K-Patents Semicon Process Refractometer PR-33-S A small footprint, ultra-pure PTFE Teflon sensor for the cleanroom environments and integrated process tools. Monitors real-time the chemical concentrations and provides an Ethernet output signal and immediate feedback to the control system. Connected to the process by a 1/4 inch, 1/2 inch, 3/4 inch or 1 inch pillar or flare fitting.

	K-Patents Semicon Process Refractometer PR-23-MS A compact, teflon body refractometer for semiconductor liquid chemical processes. Connected to the process by a flare fitting, G1/2 inch female or a 1/2 inch NPT process connection. Mounted directly in-line without filtering.

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