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K-Patents Semicon Process Refractometer PR-33-S Back to overview of Semiconductor
	Brochure Installation instructions Instruction manual Ethernet protocol specification
K-Patents Semicon Process Refractometer PR-33-S monitors concentration of fab chemicals in the cleanroom environments and in the integrated process tools (clean, etch, metal plating and CMP). The PR-33-S consists of an ultra-pure PTFE Teflon sensor and an Ethernet cable that any standard PoE (Power-over-Ethernet) switch can use for transmitting power to the sensor and data to a computer. The PR-33-S monitors chemical concentrations real-time and provides an Ethernet output signal and immediate feedback, if the chemical is out of specifications. For example, low and high concentration alarms may be configured to control and increase bath life. The concentration is determined by making an optical measurement of the solution’s refractive index nD and temperature. The PR-33-S is mounted directly in-line by a flare or pillar fitting. The PR-33-S has a compact metal-free construction and it needs only a small footprint area. The key features: PR-33-S is used for process control and monitoring. Compact and mounted directly in-line. The measurement is not influenced by particles, bubbles, or turbulent flow and impurities in the ppm range. Provides a continuous Ethernet output signal; 4-20 mA outputs available as option. Full measurement range Refractive Index nD 1.3200–1.5300, which corresponds to 0-100 % by weight. Optional range with sapphire prism nD 1.2600–1.5000. Typical accuracy R.I.+ 0.0002, which corresponds typically to 0.1% by weight, e.g. for HCl in water. N.I.S.T. traceable calibration, verification with standard R.I. liquids and K-Patents documented procedure (ISO 9000). Patented CORE-optics (US Patent No. US6067151): no drift, no re-calibration, no mechanical adjustments. Remote panel via Ethernet for data-logging and remote operation. The communication is built on the standard UDP/IP protocols. Process temperature range: -20 °C– 80 °C (-4 °F– 175 °F). Fast process temperature measurement by built-in Pt1000 and automatic digital temperature compensation.