K-Patents Oy - semiconductor

K-Patents Semicon Process Refractometer PR-23-MS Back to overview of Semiconductor
	Brochure Product manual Application note 5-00-00 Technical Paper “In-Situ Chemical Monitoring”
K-Patents Semicon Process Refractometer PR-23-MS has a built-in flow cell designed to keep all metal and corroding parts from coming into contact with the process liquid. All the wetted parts are made of ultra-pure modified Teflon® (PTFE). The prism material is spinel or sapphire. The PR-23-MS is mounted directly in-line by a flare fitting. The compact design allows integration in a wet bench or in a cabinet and the need for foot print area is very low. The concentration of dissolved solids is determined by making an optical measurement of the solution’s refractive index. The advantage of this principle is that the same instrument can be used to measure any chemical. The PR-23-MS provides a continuous 4-20 mA or digital measurement signal and immediate feedback to the control system, if the chemical is not within the specifications. The PR-23-MS is physically small and easy to install in the bulk chemicals dispense, and in point of use chemical blending, spiking and monitoring applications. With K-Patents PR-23-MS you can: Prevent wrong chemicals from entering the fabrication process. Optimize etch process and increase the bath life of the etch solution (e.g. heated KOH). Increase wafer throughput typically by +25%, and reduce cleaning chemical consumption (e.g. SC-1 or EKC-265) in FEOL and BEOL cleaning. Achieve tight control of CMP slurries and better uniformity of the planarization process. The key features: PR-23-MS is applied for process control and monitoring at the bulk chemical systems and in the in-situ wet process tools (clean, etch, metal plating and CMP). Compact and mounted direct in-line without filtering. The measurement is not influenced by particles, bubbles, or turbulent flow and impurities in the ppm range. Provides a continuous measurement signal, 4-20 mA or digital. Full measurement range Refractive Index nD 1.3200 – 1.5300, which corresponds to 0-100 % by weight. Optional range with sapphire prism nD 1.2600–1.5000. Typical accuracy of 0.1% by weight, e.g. for a HCl in water. For multicomponent solutions, the measurement signal works as a check-sum. Patented CORE-optics (US Patent No. US6067151): no drift, no re-calibration, no mechanical adjustments. Dual connectivity: one transmitter can operate two sensors. A second sensor can be easily integrated later. Ethernet connection and remote panel for data-logging and remote operation. Process temperature range: -20 °C– 130 °C (-4 °F– 266 °F) Fast process temperature measurement by built-in Pt1000 and automatic temperature compensation. ATEX approved for Zone II, area classification EX II 3 G EEx nA II T4. FM approved for Class I, Div. 2, Groups A, B, C and D, T6 CSA certified for Class I, Div. 2, Groups A, B, C and D, T4. cCSAus certified for Electrical Safety, Sensor: Class I, Pollution Deg. 3; Transmitter: Class I, Pollution Deg. 2; Installation Cat. II.