K-Patents Applications in Semiconductors Industry

5.01.00 Semiconductor Sub-Fab Operations

5.01.01 Bulk Chemical Delivery System

5.02.00 Semiconductor Clean Room Operations

5.02.01 Semiconductor Wet Chemical Process
5.02.02 Peroxide Blending and Dispence at CMP
5.02.03 KOH Etch of Silicon
5.02.04 Post-Etch Residue Removal Using Spray Tool
5.02.05 Chemical Interface Detection in Water Cleaning Systems

5.03.00 Solar (Photovoltaic) Industry

5.03.01 Removal of Residual Sawing Material from Solar Wafers


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